Fingerprint
Dive into the research topics of 'Structural properties of amorphous carbon nitride films prepared by reactive rf-magnetron sputtering'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Structural properties of amorphous carbon nitride films prepared by reactive rf-magnetron sputtering
Noriaki Nakayama, Yasuaki Tsuchiya, Satoru Tamada, Kouji Kosuge, Shinji Nagata, Katsumi Takahiro, Sadae Yamaguchi
Research output: Contribution to journal › Article › peer-review
136
Citations
(Scopus)