Structural properties of amorphous carbon nitride films prepared by reactive rf-magnetron sputtering

Noriaki Nakayama, Yasuaki Tsuchiya, Satoru Tamada, Kouji Kosuge, Shinji Nagata, Katsumi Takahiro, Sadae Yamaguchi

Research output: Contribution to journalArticlepeer-review

134 Citations (Scopus)

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Engineering & Materials Science

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