TY - JOUR
T1 - Structural modification of a-C
T2 - H films caused by 2 MeV 4He ion irradiation
AU - Takahiro, K.
AU - Yamasaki, T.
AU - Nishiyama, F.
AU - Osaka, Y.
AU - Nagata, S.
AU - Yamaguchi, S.
PY - 1991/7/1
Y1 - 1991/7/1
N2 - The structural modification due to 2 MeV 4He ion irradiation with doses ranging from 0.55 to 2.7 × 1016/cm2 is investigated for a-C: H films prepared by a rf glow discharge of methane gas. Reflectance spectra from the films with and without irradiation are measured in the photon energy range up to 25 eV. An effective medium approximation (EMA) is applied to analyze the dielectric function obtained from the reflectance spectra. The EMA results show that the polymeric component decreases with the increase of the ion beam dose. The effect of the He ion irradiation is to increase σ-π hybridization in the graphitic phase.
AB - The structural modification due to 2 MeV 4He ion irradiation with doses ranging from 0.55 to 2.7 × 1016/cm2 is investigated for a-C: H films prepared by a rf glow discharge of methane gas. Reflectance spectra from the films with and without irradiation are measured in the photon energy range up to 25 eV. An effective medium approximation (EMA) is applied to analyze the dielectric function obtained from the reflectance spectra. The EMA results show that the polymeric component decreases with the increase of the ion beam dose. The effect of the He ion irradiation is to increase σ-π hybridization in the graphitic phase.
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U2 - 10.1016/0168-583X(91)95834-Z
DO - 10.1016/0168-583X(91)95834-Z
M3 - Article
AN - SCOPUS:26544433017
VL - 59-60
SP - 1374
EP - 1377
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - PART 2
ER -