Structural investigation of nitrided c -sapphire substrate by grazing incidence x-ray diffraction and transmission electron microscopy

Hyo Jong Lee, Jun Seok Ha, S. W. Lee, H. J. Lee, H. Goto, S. H. Lee, M. W. Cho, T. Yao, T. Minegishi, T. Hanada, Soon Ku Hong, Osami Sakata, Jae Wook Lee, Jeong Yong Lee

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Abstract

A grazing incidence x-ray diffraction with a synchrotron radiation and a cross-sectional high-resolution transmission electron microscopy were performed on the sapphire surface nitrided at 1080 °C for 30 min. The thickness of the nitrided layer was about 2 nm. It was found out that the wurtzite, zinc-blende, and 30° rotated zinc-blende aluminum nitrides were formed on the sapphire surface. The 30° rotated zb-AlN formed the incoherent interface and has higher activation energy of formation, while the nonrotated zb-AlN formed the coherent interface.

Original languageEnglish
Article number202116
JournalApplied Physics Letters
Volume91
Issue number20
DOIs
Publication statusPublished - 2007 Nov 23

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Lee, H. J., Ha, J. S., Lee, S. W., Lee, H. J., Goto, H., Lee, S. H., Cho, M. W., Yao, T., Minegishi, T., Hanada, T., Hong, S. K., Sakata, O., Lee, J. W., & Lee, J. Y. (2007). Structural investigation of nitrided c -sapphire substrate by grazing incidence x-ray diffraction and transmission electron microscopy. Applied Physics Letters, 91(20), [202116]. https://doi.org/10.1063/1.2815919