It has been reported by one of the authors (A.H.) of the present study that ultrashallow thermal donors (USTDs) with a hydrogen-like electronic structure are formed in C- and N-doped O-rich Si crystals at approximately 450-600 °C. In this paper, it is reported that there are two types of USTDs: USTDs comprising C, H, and O [D(C,H,O)s] and USTDs comprising C, N, and O [D(C,N,O)s]. The thermal stability of these two types of donors was different; D(C,N,O)s were stable at 600 °C, while D(C,H,O)s were not stable at approximately 600 °C.
ASJC Scopus subject areas
- Physics and Astronomy(all)