Structural characterization of iron silicides nanoparticles grown on Si substrate: Annealing rate dependence

J. H. Won, Kazuhisa Sato, M. Ishimaru, Y. Hirotsu

    Research output: Contribution to journalArticlepeer-review

    Abstract

    We have synthesized iron silicides on a Si(111) substrate using an electron-beam evaporation technique in combination with thermal annealing. The microstructures, as a function of heating rate on annealing, were characterized by transmission electron microscopy (TEM). Bright-field plan-view TEM observations revealed that a discontinuous thin film is formed in the sample annealed rapidly, while complete separated nanoparticles were obtained in the specimen annealed slowly. Selected-area and nano-beam electron diffraction patterns indicated that the former and latter specimens mainly consist of iron monosilicide (ε-FeSi) and iron disilicide (β-FeSi2) phases, respectively.

    Original languageEnglish
    Pages (from-to)2611-2614
    Number of pages4
    JournalJournal of Materials Science
    Volume41
    Issue number9
    DOIs
    Publication statusPublished - 2006 May 1

    ASJC Scopus subject areas

    • Materials Science(all)
    • Mechanics of Materials
    • Mechanical Engineering

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