Structural characteristics of diamond-like nanocomposite films grown by PECVD

Won Jae Yang; Yong Ho Choa; Tohru Sekino; Kwang Bo Shim; Koichi Niihara; Keun Ho Auh

doi:10.1016/S0167-577X(03)00053-3

Structural characteristics of diamond-like nanocomposite films grown by PECVD

Won Jae Yang, Yong Ho Choa, Tohru Sekino, Kwang Bo Shim, Koichi Niihara, Keun Ho Auh

Institute of Multidisciplinary Research for Advanced Materials (IMRAM)

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

Diamond-like nanocomposite (DLN) films have been deposited on Si substrates using CH₄/(C₂H₅O)₄Si/H₂/Ar gas mixtures as source gases by conventional plasma-enhanced chemical vapor deposition (PECVD). The film structure was investigated by transmission electron microscope (TEM), Fourier transform infrared spectrometer (FT-IR) and Raman spectrometry. The DLN films deposited mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The mechanical and tribological properties as well as microstructural modifications of the grown films were investigated. In order to understand the characteristics of DLN films, the diamond-like carbon (DLC) films were also prepared using CH₄/H₂ gases by the same deposition process.

Original language	English
Pages (from-to)	3305-3310
Number of pages	6
Journal	Materials Letters
Volume	57
Issue number	21
DOIs	https://doi.org/10.1016/S0167-577X(03)00053-3
Publication status	Published - 2003 Jul

Keywords

Diamond-like nanocomposite film
PECVD
Raman
Structural characteristics

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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@article{41a89eecf003454995c2a32b6d696ee7,

title = "Structural characteristics of diamond-like nanocomposite films grown by PECVD",

abstract = "Diamond-like nanocomposite (DLN) films have been deposited on Si substrates using CH4/(C2H5O)4Si/H2/Ar gas mixtures as source gases by conventional plasma-enhanced chemical vapor deposition (PECVD). The film structure was investigated by transmission electron microscope (TEM), Fourier transform infrared spectrometer (FT-IR) and Raman spectrometry. The DLN films deposited mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The mechanical and tribological properties as well as microstructural modifications of the grown films were investigated. In order to understand the characteristics of DLN films, the diamond-like carbon (DLC) films were also prepared using CH4/H2 gases by the same deposition process.",

keywords = "Diamond-like nanocomposite film, PECVD, Raman, Structural characteristics",

author = "Yang, {Won Jae} and Choa, {Yong Ho} and Tohru Sekino and Shim, {Kwang Bo} and Koichi Niihara and Auh, {Keun Ho}",

note = "Funding Information: This study was financially supported by the Korean Science and Engineering Foundation (KOSEF) through the Ceramic Processing Research Center (CPRC) and also by the Core University Program between Hanyang University, Korea, and Osaka University, Japan.",

year = "2003",

month = jul,

doi = "10.1016/S0167-577X(03)00053-3",

language = "English",

volume = "57",

pages = "3305--3310",

journal = "Materials Letters",

issn = "0167-577X",

publisher = "Elsevier",

number = "21",

}

TY - JOUR

T1 - Structural characteristics of diamond-like nanocomposite films grown by PECVD

AU - Yang, Won Jae

AU - Choa, Yong Ho

AU - Sekino, Tohru

AU - Shim, Kwang Bo

AU - Niihara, Koichi

AU - Auh, Keun Ho

N1 - Funding Information: This study was financially supported by the Korean Science and Engineering Foundation (KOSEF) through the Ceramic Processing Research Center (CPRC) and also by the Core University Program between Hanyang University, Korea, and Osaka University, Japan.

PY - 2003/7

Y1 - 2003/7

N2 - Diamond-like nanocomposite (DLN) films have been deposited on Si substrates using CH4/(C2H5O)4Si/H2/Ar gas mixtures as source gases by conventional plasma-enhanced chemical vapor deposition (PECVD). The film structure was investigated by transmission electron microscope (TEM), Fourier transform infrared spectrometer (FT-IR) and Raman spectrometry. The DLN films deposited mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The mechanical and tribological properties as well as microstructural modifications of the grown films were investigated. In order to understand the characteristics of DLN films, the diamond-like carbon (DLC) films were also prepared using CH4/H2 gases by the same deposition process.

AB - Diamond-like nanocomposite (DLN) films have been deposited on Si substrates using CH4/(C2H5O)4Si/H2/Ar gas mixtures as source gases by conventional plasma-enhanced chemical vapor deposition (PECVD). The film structure was investigated by transmission electron microscope (TEM), Fourier transform infrared spectrometer (FT-IR) and Raman spectrometry. The DLN films deposited mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The mechanical and tribological properties as well as microstructural modifications of the grown films were investigated. In order to understand the characteristics of DLN films, the diamond-like carbon (DLC) films were also prepared using CH4/H2 gases by the same deposition process.

KW - Diamond-like nanocomposite film

KW - PECVD

KW - Raman

KW - Structural characteristics

UR - http://www.scopus.com/inward/record.url?scp=0037733929&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037733929&partnerID=8YFLogxK

U2 - 10.1016/S0167-577X(03)00053-3

DO - 10.1016/S0167-577X(03)00053-3

M3 - Article

AN - SCOPUS:0037733929

SN - 0167-577X

VL - 57

SP - 3305

EP - 3310

JO - Materials Letters

JF - Materials Letters

IS - 21

ER -

Structural characteristics of diamond-like nanocomposite films grown by PECVD

Abstract

Keywords

ASJC Scopus subject areas

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