Structural and optical properties of electro-optic material: Sputtered (Ba,Sr)TiO3

Masato Suzuki, Zhimou Xu, Yuichiro Tanushi, Shin Yokoyama

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


In order to develop a novel ring resonator optical switch, we have studied the structural and optical properties of the electrooptic material (Ba,Sr)TiO3 (BST) deposited by RF sputtering on a SiO2 cladding layer (1.0 μm). The crystallinity of the BST films is evaluated by X-ray diffraction and the optical propagation loss of the waveguides is measured using a He-Ne laser. As a result, it is found that there is a strong relationship between the optical propagation loss and crystallinity of the sputtered film. It is suggested that the propagating light is influenced by the crystal property, for example, the grain size and density of the polycrystalling BST film.

Original languageEnglish
Pages (from-to)3488-3492
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number4 B
Publication statusPublished - 2006 Apr 25
Externally publishedYes


  • (ba,Sr)TiO (BST)
  • Ferroelectric thin film
  • Optical propagation loss
  • X-ray diffraction

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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