Structural analysis of threading dislocations in AlN thin films

Y. Tokumoto, N. Shibata, T. Mizoguchi, T. Yamamoto, Y. Ikuhara

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Pages (from-to)258-259
    Number of pages2
    JournalMicroscopy and Microanalysis
    Volume14
    Issue numberSUPPL. 2
    DOIs
    Publication statusPublished - 2008 Aug 1

    ASJC Scopus subject areas

    • Instrumentation

    Cite this