Strong temperature dependence of the initial oxide growth on the Si(111)7 × 7 surface

Jia Yi Tang, Kiwamu Nishimoto, Shuichi Ogawa, Yuji Takakuwa

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

Temperature dependence of oxide growth kinetics on the Si(111)7×7 surface has been investigated by ultraviolet photoelectron spectroscopy. The amount of adsorbed oxygen on the Si surface during oxidation can be obtained from the O 2p spectra, which showed that the amount of oxygen increased with temperature below 600°C. It was found that the results cannot be described by the dual-oxide-species model for Langmuir-type adsorption in which adsorbed oxygen hardly moves on the surface. Therefore, we propose a new reaction model in which the migration and agglomeration of metastable oxygen on the surface should be considered. By studying the results of work function, we concluded that more adsorbed oxygen on the surface may incorporate into the back bond and a larger amount of defects can be generated at the Si/SiO2 interface at higher temperature.

Original languageEnglish
Pages (from-to)525-529
Number of pages5
Journale-Journal of Surface Science and Nanotechnology
Volume10
DOIs
Publication statusPublished - 2012 Sep 22

Keywords

  • Adsorption kinetics
  • Real-time photoelectron spectroscopy
  • Si oxides
  • Thermal oxidation
  • Ultraviolet photoelectron spectroscopy

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Condensed Matter Physics
  • Mechanics of Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'Strong temperature dependence of the initial oxide growth on the Si(111)7 × 7 surface'. Together they form a unique fingerprint.

Cite this