Stress state analysis of stress engineered BaTiO3 thin film by LaNiO3 bottom electrode

Kohei Murakoshi, Kohei Fukamachi, Naonori Sakamoto, Tomoya Ohno, Takanori Kiguchi, Takeshi Matsuda, Toyohiko Konno, Naoki Wakiya, Hisao Suzuki

Research output: Contribution to journalArticlepeer-review

Abstract

Ferroelectric materials with excellent performance without containing lead has been desired for saving human body from a harmful element, lead. The authors have reported BaTiO3 (BTO) thin films with enhanced ferroelectricity by stress engineering by thermal stress assisted by LaNiO3 (LNO) bottom electrodes. In the present study, we investigate the local stress state of the BTO and LNO films using TEM techniques. TEM observation reveals that the LNO film is porous structure whereas the BTO film is dense. Electron diffraction and dark field images of the films also reveal that the BTO and LNO films oriented along [001] and [100] directions perpendicular to the film plane, respectively. Another effect on the stressed BTO films, increased Curie temperature owing to the stabilized tetragonal phase, is also reported.

Original languageEnglish
Pages (from-to)273-277
Number of pages5
JournalJournal of the Ceramic Society of Japan
Volume121
Issue number1411
DOIs
Publication statusPublished - 2013 Mar

Keywords

  • Stress engineering
  • TEM
  • Thin film

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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