Strain sensitivity in Tungsten-containing diamond-like carbon films for strain sensor applications

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5 Citations (Scopus)

Abstract

Tungsten-containing diamond-like carbon (W-DLC) film was investigated with the aim of strain sensor application. Three samples deposited under different methane flow rates were investigated. The strain dependence of normalized resistance has a linear dependence and the gauge factor has positive and negative values. The sensitivity and temperature coefficient of resistance (TCR) increase with an increase in the methane flow rate. However, from a practical point of view the sample with the lowest gauge factor is most appropriate for a stain sensor because it has the smallest TCR of the three samples.

Original languageEnglish
Pages (from-to)211-217
Number of pages7
JournalInternational Journal of Applied Electromagnetics and Mechanics
Volume28
Issue number1-2
DOIs
Publication statusPublished - 2008

Keywords

  • Diamond-like carbon (DLC)
  • Strain sensor
  • Tungsten metal

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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