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Strain relaxation and induced defects in SiGe thin films grown on ion-implanted Si substrates
Junji Yamanaka, Kentaro Sawano, Kiyokazu Nakagawa, Kumiko Suzuki, Yusuke Ozawa, Shinji Koh, Takeo Hattori, Yasuhiro Shiraki
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)