Strain distribution in heterolayers with low misfit as revealed by convergent beam illumination methods

Zuzanna Liliental-Weber, T. Kaneyama, M. Terauchi, M. Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Convergent beam electron diffraction (CBED) was applied to the local measurements of lattice parameter across a strained interface with small mismatch. GaAs layers grown at low temperature with excess As (with 0.15% misfit) on a GaAs substrate were chosen for these studies. Tetragonal distortion was detected in the layer up to 0.5 μm from the interface. With an increase of the layer thickness lowering of the symmetry of these CBED patterns was observed. This lowering of symmetry is most probably due to saturation of As solubility and the strain build into these layers.

Original languageEnglish
Title of host publicationEvolution of Surface and Thin Film Microstructure
EditorsHarry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally
PublisherPubl by Materials Research Society
Pages421-424
Number of pages4
ISBN (Print)1558991751
Publication statusPublished - 1993 Dec 1
Externally publishedYes
EventProceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: 1992 Nov 301992 Dec 4

Publication series

NameMaterials Research Society Symposium Proceedings
Volume280
ISSN (Print)0272-9172

Other

OtherProceedings of the 1992 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period92/11/3092/12/4

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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