Stochastic gravity sensor with robust output using white-noise-applied Bi-stable state for low S/N environments

Y. Hatakeyama, M. Esashi, S. Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrated a new stochastic gravity sensor, which just counts the number, m, of pull-in to either of counter electrodes in n-times trials to know pull-in probability, m/n, under white-noise-applied bistable state. This new sensing principle is robust against noise and parasitics, which severely limit sensor performance in such a low S/N condition that the sensor in a high temperature environment is connected with a readout circuit using a long wire. Pull-in to the counter electrode resulted in large capacitance change, and clear sensing signal is obtained even in the low S/N condition. The gravity sensor was fabricated on a silicon/glass substrate, and the sensing principle was experimentally confirmed.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages132-135
Number of pages4
DOIs
Publication statusPublished - 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 2012 Jan 292012 Feb 2

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/TerritoryFrance
CityParis
Period12/1/2912/2/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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