TY - JOUR
T1 - Step and repeat ultraviolet nanoimprinting under pentafluoropropane gas ambient
AU - Iyoshi, Shuso
AU - Okada, Makoto
AU - Katase, Tetsuya
AU - Tone, Katsuhiko
AU - Kobayashi, Kei
AU - Kaneko, Shu
AU - Haruyama, Yuichi
AU - Nakagawa, Masaru
AU - Hiroshima, Hiroshi
AU - Matsui, Shinji
PY - 2012/6/1
Y1 - 2012/6/1
N2 - In the UV nanoimprinting process an antisticking layer such as fluorinated self-assembled monolayer (F-SAM) is grafted on the mold surface to diminish the demolding impact. These layers are supposed to deteriorate as the imprint steps mount up, resulting in defects in the cured resist layer. In this work, continuous multiple shots of UV nanoimprint were conducted in the air and in pentafluoropropane (PFP) gas environment and demolding forces in every imprint step were determined. The experiments revealed that the demolding forces for the imprint in PFP atmosphere drastically reduced compared with those in the air. Water contact angles of the mold surface were also determined in every 225 imprint steps to observe the degree of degradation of the antisticking layer. It was found that the antisticking layer was less damaged or contaminated in the PFP environment than it was in the air after a certain number of imprint steps.
AB - In the UV nanoimprinting process an antisticking layer such as fluorinated self-assembled monolayer (F-SAM) is grafted on the mold surface to diminish the demolding impact. These layers are supposed to deteriorate as the imprint steps mount up, resulting in defects in the cured resist layer. In this work, continuous multiple shots of UV nanoimprint were conducted in the air and in pentafluoropropane (PFP) gas environment and demolding forces in every imprint step were determined. The experiments revealed that the demolding forces for the imprint in PFP atmosphere drastically reduced compared with those in the air. Water contact angles of the mold surface were also determined in every 225 imprint steps to observe the degree of degradation of the antisticking layer. It was found that the antisticking layer was less damaged or contaminated in the PFP environment than it was in the air after a certain number of imprint steps.
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U2 - 10.1143/JJAP.51.06FJ08
DO - 10.1143/JJAP.51.06FJ08
M3 - Article
AN - SCOPUS:84863323992
VL - 51
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 6 PART 2
M1 - 06FJ08
ER -