Statistical optimization of a DC-RF hybrid plasma flow system for in-flight particle treatment

K. Kawajiri, K. Ramachandran, H. Nishiyama

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

There are many input parameters to control a DC-RF hybrid plasma flow system, such as total gas flow rate, central gas flow rate, swirl gas ratio, RF power and DC power. Furthermore, the interactive effects among these parameters should be considered. In the present study, statistical analysis using simple linear model is conducted to clarify the effects of the input parameters and their interactions on the outputs such as particle residence time and average temperature in a DC-RF hybrid plasma flow system. The thermofluid characteristics of a DC-RF hybrid plasma flow are compared with those of an RF plasma flow. It is shown that the plasma characteristics are changed drastically by adding even small DC power. Furthermore, controllability is also improved by optimizing the operating conditions of a DC-RF hybrid plasma flow system.

Original languageEnglish
Pages (from-to)183-190
Number of pages8
JournalInternational Journal of Heat and Mass Transfer
Volume48
Issue number1
DOIs
Publication statusPublished - 2005 Jan

Keywords

  • DC-RF hybrid plasma flow
  • Interaction
  • Optimization
  • Particle
  • Statistical analysis
  • Thermofluid field

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

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