Statistical analysis of RTS noise and low frequency noise in 1M MOSFETs using an advanced TEG

K. Abe; S. Sugawa; S. Watabe; N. Miyamoto; A. Teramoto; M. Toita; Y. Kamata; K. Shibusawa; T. Ohmi

doi:10.1063/1.2759648

Statistical analysis of RTS noise and low frequency noise in 1M MOSFETs using an advanced TEG

K. Abe, S. Sugawa, S. Watabe, N. Miyamoto, A. Teramoto, M. Toita, Y. Kamata, K. Shibusawa, T. Ohmi

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

In this paper, we developed an advanced Test Element Group (TEG) which can measure Random Telegraph Signal (RTS) noise in over 10⁶ nMOSFETs including various gate sizes with high accuracy in a very short time. We measured and analyzed these noises statistically, as the result, we confirmed that appearance probabilities in the TEG and noise intensities of RTS are dependent on gate sizes.

Original language	English
Title of host publication	Noise and Fluctuations - 19th International Conference on Noise and Fluctuations, ICNF 2007
Pages	115-118
Number of pages	4
DOIs	https://doi.org/10.1063/1.2759648
Publication status	Published - 2007
Event	19th International Conference on Noise and Fluctuations, ICNF2007 - Tokyo, Japan Duration: 2007 Sep 9 → 2007 Sep 14

Publication series

Name	AIP Conference Proceedings
Volume	922
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Other

Other	19th International Conference on Noise and Fluctuations, ICNF2007
Country/Territory	Japan
City	Tokyo
Period	07/9/9 → 07/9/14

Keywords

MOSFET
RTS noise
Statistical Analysis
Test Element Group

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.2759648

Cite this

Abe, K., Sugawa, S., Watabe, S., Miyamoto, N., Teramoto, A., Toita, M., Kamata, Y., Shibusawa, K., & Ohmi, T. (2007). Statistical analysis of RTS noise and low frequency noise in 1M MOSFETs using an advanced TEG. In Noise and Fluctuations - 19th International Conference on Noise and Fluctuations, ICNF 2007 (pp. 115-118). (AIP Conference Proceedings; Vol. 922). https://doi.org/10.1063/1.2759648

Statistical analysis of RTS noise and low frequency noise in 1M MOSFETs using an advanced TEG. / Abe, K.; Sugawa, S.; Watabe, S.; Miyamoto, N.; Teramoto, A.; Toita, M.; Kamata, Y.; Shibusawa, K.; Ohmi, T.

Noise and Fluctuations - 19th International Conference on Noise and Fluctuations, ICNF 2007. 2007. p. 115-118 (AIP Conference Proceedings; Vol. 922).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abe, K, Sugawa, S, Watabe, S, Miyamoto, N, Teramoto, A, Toita, M, Kamata, Y, Shibusawa, K & Ohmi, T 2007, Statistical analysis of RTS noise and low frequency noise in 1M MOSFETs using an advanced TEG. in Noise and Fluctuations - 19th International Conference on Noise and Fluctuations, ICNF 2007. AIP Conference Proceedings, vol. 922, pp. 115-118, 19th International Conference on Noise and Fluctuations, ICNF2007, Tokyo, Japan, 07/9/9. https://doi.org/10.1063/1.2759648

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Statistical analysis of RTS noise and low frequency noise in 1M MOSFETs using an advanced TEG

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Keywords

ASJC Scopus subject areas

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