Stainless steel-based integrated mass-flow controller for reactive and corrosive gases

Kaoru Hirata, Masayoshi Esashi

Research output: Contribution to journalConference articlepeer-review

13 Citations (Scopus)


This paper describes the fabrication and characterization of an anti-corrosive integrated mass-flow controller made of stainless steel and aluminum nitride (AlN) for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally open micro valve and a thermal flow sensor. A stacked piezo valve actuator mounted on a thin diaphragm is utilized for precise and rapid control of gas flow. The flow sensor consisting of two heaters can detect a flow rate by differential resistance of the two heaters. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a quick response less than 10 ms, and has a small dead volume by the miniaturization and integration. It is confirmed that this device is not attacked by chlorine gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control of corrosive gases with quick response.

Original languageEnglish
Pages (from-to)33-38
Number of pages6
JournalSensors and Actuators, A: Physical
Publication statusPublished - 2002 Apr 1
Externally publishedYes
EventTransducers'01 Eurosensors XV - Munich, Germany
Duration: 2001 Jun 102001 Jun 14


  • AlN
  • Flow control valve
  • Flow sensor
  • Mass-flow controller
  • Stainless steel

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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