TY - JOUR
T1 - Staining-free observation of polymer blend thin films on transmission extreme ultraviolet microscopy
AU - Toyoda, Mitsunori
AU - Aizawa, Shunsuke
AU - Gondai, Shiori
AU - Kakudate, Toshiyuki
AU - Ageishi, Masaki
AU - Jinnai, Hiroshi
AU - Chen, Jun
N1 - Funding Information:
Content from this work may be used under the terms of the . Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Cabinet Office, Government of Japan https://doi.org/10.13039/501100002770 ImPACT Program of Council for Science Technology Ministry of Education, Culture, Sports, Science and Technology https://doi.org/10.13039/501100001700 Grant-in-Aid for Scientific Research (B) 16H03877 yes � 2020 The Japan Society of Applied Physics Creative Commons Attribution 4.0 license
Publisher Copyright:
© 2020 The Japan Society of Applied Physics.
PY - 2020/8/1
Y1 - 2020/8/1
N2 - Transmission extreme ultraviolet microscopy is applied to the staining-free observation of a poly(styrene-methyl methacrylate) (PS/PMMA) blend. At a photon energy of 92 eV, the imaginary part of the atomic scattering factor for oxygen, which represents the absorption, is four-times larger than that of carbon, and microstructures can be visualized by the contrast resulting from the presence of oxygen. Based on the signal to noise ratio of the images, we consider the optimum photon energy and sample thickness for common polymer blends. Finally, a practical high contrast of 30% is successfully demonstrated for the PS/PMMA thin film.
AB - Transmission extreme ultraviolet microscopy is applied to the staining-free observation of a poly(styrene-methyl methacrylate) (PS/PMMA) blend. At a photon energy of 92 eV, the imaginary part of the atomic scattering factor for oxygen, which represents the absorption, is four-times larger than that of carbon, and microstructures can be visualized by the contrast resulting from the presence of oxygen. Based on the signal to noise ratio of the images, we consider the optimum photon energy and sample thickness for common polymer blends. Finally, a practical high contrast of 30% is successfully demonstrated for the PS/PMMA thin film.
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U2 - 10.35848/1882-0786/aba882
DO - 10.35848/1882-0786/aba882
M3 - Article
AN - SCOPUS:85090012582
VL - 13
JO - Applied Physics Express
JF - Applied Physics Express
SN - 1882-0778
IS - 8
M1 - 082011
ER -