S0 mode lamb wave resonators using LiNbO3 thin plate on acoustic multilayer reflector

Tetsuya Kimura, Katsuya Daimon, Takashi Ogami, Michio Kadota

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Abstract

Lamb wave modes can be classified as a fundamental anti-symmetric mode (A0), a symmetric mode (S0), and their higher order modes. Membrane-type A1 mode Lamb wave resonators have been reported by the authors for future mobile communication systems. Although the reports show promising results, it is difficult to fabricate the resonators because they have a large dispersion of phase velocity and electromechanical coupling factor, and also are fragile. In this study, the authors suggest a solidly mounted resonator (SMR)-type S0 mode Lamb wave resonator, which can solve the above-mentioned difficulty. An SMR-type S0 mode Lamb wave resonator was successfully realized for the first time. The resonator exhibits a 1.5 times faster phase velocity and a 1/3 smaller temperature coefficient of frequency than the commonly used surface acoustic wave (SAW) devices composed of an Al electrode and a 36-48YX-LiTaO3 substrate.

Original languageEnglish
Article number07HD03
JournalJapanese journal of applied physics
Volume52
Issue number7 PART 2
DOIs
Publication statusPublished - 2013 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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