SR-PES and STM observation of metastable chemisorption state of oxygen on Si(1 1 0)-16 × 2 surface

Yoshihisa Yamamoto, Hideaki Togashi, Atsushi Kato, Yuya Takahashi, Atsushi Konno, Yuden Teraoka, Akitaka Yoshigoe, Hidehito Asaoka, Maki Suemitsu

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

Initial adsorption of oxygen molecules on the Si(1 1 0)-16 × 2 surface and subsequent modification of the bonding states induced by mild (300 °C) annealing have been studied by synchrotron-radiation photoemission spectroscopy and scanning-tunneling microscopy. It has been shown that upon annealing, the intensity and the energy positions of the Si 2p suboxide components shift towards the values characteristic for the thermal oxide. This indicates the presence of a metastable chemisorption state of oxygen on the Si(1 1 0)-16 × 2 surface.

Original languageEnglish
Pages (from-to)6232-6234
Number of pages3
JournalApplied Surface Science
Volume254
Issue number19
DOIs
Publication statusPublished - 2008 Jul 30

Keywords

  • Adsorbate structure
  • Dry oxidation
  • Si(1 1 0) surface
  • Thermal stability

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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