SR-PES and STM observation of metastable chemisorption state of oxygen on Si(1 1 0)-16 × 2 surface

Yoshihisa Yamamoto; Hideaki Togashi; Atsushi Kato; Yuya Takahashi; Atsushi Konno; Yuden Teraoka; Akitaka Yoshigoe; Hidehito Asaoka; Maki Suemitsu

doi:10.1016/j.apsusc.2008.02.148

SR-PES and STM observation of metastable chemisorption state of oxygen on Si(1 1 0)-16 × 2 surface

Yoshihisa Yamamoto, Hideaki Togashi, Atsushi Kato, Yuya Takahashi, Atsushi Konno, Yuden Teraoka, Akitaka Yoshigoe, Hidehito Asaoka, Maki Suemitsu

Information Devices Division

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Initial adsorption of oxygen molecules on the Si(1 1 0)-16 × 2 surface and subsequent modification of the bonding states induced by mild (300 °C) annealing have been studied by synchrotron-radiation photoemission spectroscopy and scanning-tunneling microscopy. It has been shown that upon annealing, the intensity and the energy positions of the Si 2p suboxide components shift towards the values characteristic for the thermal oxide. This indicates the presence of a metastable chemisorption state of oxygen on the Si(1 1 0)-16 × 2 surface.

Original language	English
Pages (from-to)	6232-6234
Number of pages	3
Journal	Applied Surface Science
Volume	254
Issue number	19
DOIs	https://doi.org/10.1016/j.apsusc.2008.02.148
Publication status	Published - 2008 Jul 30

Keywords

Adsorbate structure
Dry oxidation
Si(1 1 0) surface
Thermal stability

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2008.02.148

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title = "SR-PES and STM observation of metastable chemisorption state of oxygen on Si(1 1 0)-16 × 2 surface",

abstract = "Initial adsorption of oxygen molecules on the Si(1 1 0)-16 × 2 surface and subsequent modification of the bonding states induced by mild (300 °C) annealing have been studied by synchrotron-radiation photoemission spectroscopy and scanning-tunneling microscopy. It has been shown that upon annealing, the intensity and the energy positions of the Si 2p suboxide components shift towards the values characteristic for the thermal oxide. This indicates the presence of a metastable chemisorption state of oxygen on the Si(1 1 0)-16 × 2 surface.",

keywords = "Adsorbate structure, Dry oxidation, Si(1 1 0) surface, Thermal stability",

author = "Yoshihisa Yamamoto and Hideaki Togashi and Atsushi Kato and Yuya Takahashi and Atsushi Konno and Yuden Teraoka and Akitaka Yoshigoe and Hidehito Asaoka and Maki Suemitsu",

year = "2008",

month = jul,

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doi = "10.1016/j.apsusc.2008.02.148",

language = "English",

volume = "254",

pages = "6232--6234",

journal = "Applied Surface Science",

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TY - JOUR

T1 - SR-PES and STM observation of metastable chemisorption state of oxygen on Si(1 1 0)-16 × 2 surface

AU - Yamamoto, Yoshihisa

AU - Togashi, Hideaki

AU - Kato, Atsushi

AU - Takahashi, Yuya

AU - Konno, Atsushi

AU - Teraoka, Yuden

AU - Yoshigoe, Akitaka

AU - Asaoka, Hidehito

AU - Suemitsu, Maki

PY - 2008/7/30

Y1 - 2008/7/30

N2 - Initial adsorption of oxygen molecules on the Si(1 1 0)-16 × 2 surface and subsequent modification of the bonding states induced by mild (300 °C) annealing have been studied by synchrotron-radiation photoemission spectroscopy and scanning-tunneling microscopy. It has been shown that upon annealing, the intensity and the energy positions of the Si 2p suboxide components shift towards the values characteristic for the thermal oxide. This indicates the presence of a metastable chemisorption state of oxygen on the Si(1 1 0)-16 × 2 surface.

AB - Initial adsorption of oxygen molecules on the Si(1 1 0)-16 × 2 surface and subsequent modification of the bonding states induced by mild (300 °C) annealing have been studied by synchrotron-radiation photoemission spectroscopy and scanning-tunneling microscopy. It has been shown that upon annealing, the intensity and the energy positions of the Si 2p suboxide components shift towards the values characteristic for the thermal oxide. This indicates the presence of a metastable chemisorption state of oxygen on the Si(1 1 0)-16 × 2 surface.

KW - Adsorbate structure

KW - Dry oxidation

KW - Si(1 1 0) surface

KW - Thermal stability

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DO - 10.1016/j.apsusc.2008.02.148

M3 - Article

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SN - 0169-4332

VL - 254

SP - 6232

EP - 6234

JO - Applied Surface Science

JF - Applied Surface Science

IS - 19

ER -

SR-PES and STM observation of metastable chemisorption state of oxygen on Si(1 1 0)-16 × 2 surface

Abstract

Keywords

ASJC Scopus subject areas

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