Sputtering Target for Information Network Devices —Present and Future—

Migaku Takahashi, Shin Saito, Masakiyo Tsunoda

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)22-27
Number of pages6
JournalShinku/Journal of the Vacuum Society of Japan
Volume50
Issue number1
DOIs
Publication statusPublished - 2007 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this