Sputter epitaxy of Pb(Zr, Ti)O3 and Pb(Mg1/3, Nb2/3)O3-PbTiO3 Thin Films on Si for high-performance Piezoelectric MEMS

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationSmart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems
EditorsThomas Otto
PublisherMesago Messe Frankfurt GmbH
Pages233-239
Number of pages7
ISBN (Print)9783957350824
Publication statusPublished - 2018
EventSmart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems - Dresden, Germany
Duration: 2018 Apr 112018 Apr 12

Publication series

NameSmart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems

Other

OtherSmart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems
CountryGermany
CityDresden
Period18/4/1118/4/12

ASJC Scopus subject areas

  • Computer Science Applications
  • Computer Networks and Communications
  • Artificial Intelligence

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