Sputter deposited zinc oxide photoconductive antenna on silicon substrate for sub-terahertz time-domain spectroscopy

Kentaro Iwami, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

In this paper, we report on the design, fabrication and characterization of a zinc oxide (ZnO) photoconductive antenna as a sub-terahertz (THz) pulse emitter or detector for time-domain spectroscopy (TDS). A ZnO thin film is deposited by rf magnetron sputtering on a silicon substrate. The resistivity of the deposited ZnO was 9.6 × 10 4Ω·cm. The fabricated ZnO photoconductive antennas are evaluated using a TDS measurement system. Photoconductivity of ZnO is obtained using a Ti:Sapphire femto second laser with a wavelength of 775 nm. The bandwidth of the ZnO photoconductive antenna is evaluated to be 1 THz.

Original languageEnglish
Pages (from-to)508-509
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume127
Issue number11
DOIs
Publication statusPublished - 2007 Dec 1

Keywords

  • MEMS
  • Photoconductive antenna
  • THz-TDS
  • Terahertz (THz)
  • Zinc oxide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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