Spurious suppression without energy dissipation in aluminum-nitride-based thin-film bulk acoustic resonator using thin ring on electrode edge

Motoaki Hara, Hiroki Kuwano

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We examined the suppression of spurious responses beneath the resonant frequency in an aluminum-nitride-based thin-film bulk acoustic resonator (FBAR) by a two-dimensional (2D) finite element method (FEM) and dispersion analysis of waves. The results confirmed that the 0thorder asymmetric mode (A 0 mode) influences the resonance characteristics. As a result of these findings, we propose a structure having a thin ring on the electrode edge to take advantage of this A0 mode in suppressing spurious responses.

Original languageEnglish
Article number07GC11
JournalJapanese journal of applied physics
Volume51
Issue number7 PART2
DOIs
Publication statusPublished - 2012 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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