We examined the suppression of spurious responses beneath the resonant frequency in an aluminum-nitride-based thin-film bulk acoustic resonator (FBAR) by a two-dimensional (2D) finite element method (FEM) and dispersion analysis of waves. The results confirmed that the 0thorder asymmetric mode (A 0 mode) influences the resonance characteristics. As a result of these findings, we propose a structure having a thin ring on the electrode edge to take advantage of this A0 mode in suppressing spurious responses.
ASJC Scopus subject areas
- Physics and Astronomy(all)