@inproceedings{84acb55071374b65b306330dc38591fe,
title = "Sp3 -bonded new phases of BN; their growth by laser-plasma synchronous processing and applications",
abstract = "New sp3-bonded polytypic forms of BN, namely, 6H-BN and 30H-BN were prepared by plasma-assisted chemical vapor deposition (CVD) with an excimer laser at 193 nm being irradiated on the growing film surface. Only the 6H-BN was formed by post-deposition laser irradiation (PDL) of sp2-bonded BN precursor films prepared by plain plasma assisted CVD. The PDL demonstrated direct photo-induced phase transformation from sp2-bonded BN into denser sp3-bonded BN here. The growth mechanism was discussed with regard to the {"}bond-strength initiative rule{"}, according to which the local thermodynamics at very early stage of growth should favor the formation of the strongest bond available (e.g. sp2-hybridized bonds in BN). P-type sp3-bonded BN / n-type Si heterodiode solar cell was fabricated by thismethod and proved to work efficiently.",
keywords = "BN, CVD, Film, Laser plasma, Polytype, Solar cel",
author = "Shojiro Komastu and Kazuaki Kobayashi and Takahiro Nagata and Toyohiro Chikyo",
year = "2010",
doi = "10.1109/TENCON.2010.5686468",
language = "English",
isbn = "9781424468904",
series = "IEEE Region 10 Annual International Conference, Proceedings/TENCON",
pages = "993--994",
booktitle = "TENCON 2010 - 2010 IEEE Region 10 Conference",
note = "2010 IEEE Region 10 Conference, TENCON 2010 ; Conference date: 21-11-2010 Through 24-11-2010",
}