Spherical silicon micro-mirrors bent by anodic bonding

Takahiro Yamasaki, Ryohei Hokari, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We propose a method to generate spherical micro-mirror by anodic bonding. A flat silicon plate is bent with fulcrum to form a spherical shape by anodic bonding. Convex spherical surface is generated inside the fulcrum by the bending moment generated in circumference of micro-mirror. Due to the bent surface of silicon plate, a smooth spherical surface is obtained. The focal length is in the range form 0.4mm to 1.6mm for the fulcrum diameters from 100μm to 400μm. The fabricated micro-mirror is also used as mold for the replication of micro polymer lens. The surface profile of micro-mirror is transferred to the polymer replica with a high accuracy.

Original languageEnglish
Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages51-52
Number of pages2
DOIs
Publication statusPublished - 2009 Dec 16
Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
Duration: 2009 Aug 172009 Aug 20

Publication series

Name2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Other

Other2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Country/TerritoryUnited States
CityClearwater, FL
Period09/8/1709/8/20

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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