Spherical MgO microparticle deposition by RF impulse discharge with small coaxial electrodes

Takumasa Muraoka, Toru Kashimura, Satoru Iizuka

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We have observed for the first time a deposition of MgO microparticles with spherical shape. Experiment has been carried out in a small coaxial electrode system for an impulse discharge, consisting of an inner Mg-rod electrode of 1.7 mm in diameter, and an outer ring electrode, between which a small-diameter glass tube substrate is placed. From the SEM and Raman analyses, we have observed a formation of MgO particles with size less than several 500 nm. Most of the particles are spherical in shape, and distributed on the glass surface near the electrodes. The formation processes of the spherical particles are discussed.

Original languageEnglish
Pages (from-to)1012-1015
Number of pages4
JournalThin Solid Films
Volume518
Issue number3
DOIs
Publication statusPublished - 2009 Dec 30

Keywords

  • MgO
  • RF impulse discharge
  • Spherical nanoparticle
  • Sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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