Spherical φ 1mm SAW device based on ball semiconductor/MEMS technology

Dongyoun Sim, Akio Mizukami, Shingo Akao, Ichitaro Satoh, Maxey Bryan, Nobuo Takeda, Tuneo Ohgi, Noritaka Nakaso, Tetsusya Miyagishi, Hidekazu Tanaka, Ken Fukiura, Hirohiko Kazato, Hideyuki Watanabe, Tsuyoshi Mihara, Kazushi Yamanaka

Research output: Contribution to journalConference articlepeer-review

8 Citations (Scopus)

Abstract

Ball SAW(surface acoustic wave) device was fabricated on a spherical φ 1 mm single crystal quartz. On Z-axis cylinder, it has multiple roundtrips of more than 190 turns and a long propagation length of 157[mm] at 150[MHz] of driving frequency and 50th turns roundtrip. Using this device, we realized a hydrogen gas sensor as an application of Ball SAW device. Amplitude and delay time responses were measured under exposure to 10ppm to 3% H2 in N2 base gas by using a selective sensing film of 40nm thick Pd/Ni alloy. The response time was about 30 sec in 3% H2.

Original languageEnglish
Pages (from-to)918-921
Number of pages4
JournalProceedings - IEEE Ultrasonics Symposium
Volume2
Publication statusPublished - 2004 Dec 1
Event2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada
Duration: 2004 Aug 232004 Aug 27

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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