Spectroscopic analysis of graphitization and grain orientation of carbon films grown by photoemission-assisted plasma-enhanced chemical vapor deposition

Manabu Inukai, Eiji Ikenaga, Takayuki Muro, Shuichi Ogawa, Yoshihiro Ojiro, Yuji Takakuwa, Motonobu Sato, Mizuhisa Nihei, Naoki Yokoyama

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3 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy