Spatial analytical surface structure mapping for three-dimensional micro-shaped si by micro-beam reflection high-energy electron diffraction

Sohei Nakatsuka, Taishi Imaizumi, Tadashi Abukawa, Azusa N. Hattori, Hidekazu Tanaka, Ken Hattori

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Spatial analytical surface structure mapping for three-dimensional micro-shaped si by micro-beam reflection high-energy electron diffraction'. Together they form a unique fingerprint.

Earth and Planetary Sciences

Biochemistry, Genetics and Molecular Biology

Engineering

Physics

Material Science