Spatial analytical surface structure mapping for three-dimensional micro-shaped si by micro-beam reflection high-energy electron diffraction

Sohei Nakatsuka, Taishi Imaizumi, Tadashi Abukawa, Azusa N. Hattori, Hidekazu Tanaka, Ken Hattori

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

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