Solidly mounted resonator using shear horizontal mode plate wave in LiNbO3 plate

Michio Kadota, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

A 0-th shear horizontal (SHo) mode plate wave has an electromechanical coupling factor k2 larger than 50% in a (0°, 120°, 0°) LiNbOs (LN) plate thinner than 0.1λ (λ is a pitch of interdigital transducer). However, the structure is fragile, because the plate thickness is as thin as 0.5∼0.6 μm for devices working in several hundred MHz range. To address this issue, a solidly mounted resonator (SMR) structure was applied to SH mode plate resonators. The materials and layer thicknesses of a Bragg reflector, the Euler angle and thickness of a LN plate, and the thickness and material of electrodes were investigated to obtain large k2 and spurious-free response by finite element method (FEM) simulation. The designed Bragg reflector is composed of 6 layers of SiO2 and AlN. The best Euler angle is (0°, 90°, 0°) and the suitable thickness of a LN plate is 0.3 to 1 λ. Also, heavy and thick electrodes are better for interdigital transducers (IDT). This design is significantly different from that of the cavity type. A SMR type plate wave resonator of several hundred MHz was fabricated using 2 μm thick LN, and a wide bandwidth of 20% was measured.

Original languageEnglish
Title of host publication2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509020911
DOIs
Publication statusPublished - 2016 Aug 16
Event70th IEEE International Frequency Control Symposium, IFCS 2016 - New Orleans, United States
Duration: 2016 May 92016 May 12

Publication series

Name2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings

Other

Other70th IEEE International Frequency Control Symposium, IFCS 2016
CountryUnited States
CityNew Orleans
Period16/5/916/5/12

Keywords

  • LiNbO plate
  • SH mode plate wave
  • SMR
  • resonator

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Instrumentation

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    Kadota, M., & Tanaka, S. (2016). Solidly mounted resonator using shear horizontal mode plate wave in LiNbO3 plate. In 2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings [7546795] (2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/FCS.2016.7546795