Solidly mounted ladder filter using shear horizontal wave in LiNbO3

Michio Kadota, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

The 0-th shear horizontal (SH0) mode plate wave has an electromechanical coupling factor k2 larger than 50% in a (0°, 120°, 0°) LiNbO3 (LN) plate thinner than 0.1λ, where λ is a pitch of an intergidital transducer (IDT). In the previous study, ultra-wide-band ladder filters composed of cavity type resonators recorded 6 dB bandwidth from 41% to 51% in a digital TV band. However, the structure is fragile, because the LN plate as thin as 0.5-0.6 μm is self-suspended. Inspired by solidly mounted (SM) type film bulk acoustic resonators (FBAR), the authors have come up with SM type SH wave devices. The SM type SH wave resonator has an ultra-wide bandwidth of 20% similar to that of SH0 plate wave resonators. In this study, the SM type ladder filter with an insertion loss of 0.5 dB was developed.

Original languageEnglish
Title of host publication2016 IEEE International Ultrasonics Symposium, IUS 2016
PublisherIEEE Computer Society
ISBN (Electronic)9781467398978
DOIs
Publication statusPublished - 2016 Nov 1
Event2016 IEEE International Ultrasonics Symposium, IUS 2016 - Tours, France
Duration: 2016 Sep 182016 Sep 21

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2016-November
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2016 IEEE International Ultrasonics Symposium, IUS 2016
CountryFrance
CityTours
Period16/9/1816/9/21

Keywords

  • ladder filter
  • low insertion loss
  • multi-layer reflector
  • shear horizontal wave
  • solidly mounted type
  • wide band

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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