Soft x-ray reflection from silicon and quartz mirrors

Mihiro Yanagihara, Michio Niwano, Takashi Yamada, Shigeo Yamaguchi, Mihiro Yanagihara

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

The optical constants of silicon and quartz in the soft x-ray region (400-3750 eV) determined from the incidence-angle dependence of the specular reflectance are reported. The measured reflectance-vs-angle of incidence curves for the lower energies are quantitatively explained using a simple diffractive scattering model including the interference effect between the reflected beams, while those for the higher energies can be interpreted in terms of the microfacet model without the interference effect.

Original languageEnglish
Pages (from-to)563-566
Number of pages4
JournalApplied optics
Volume27
Issue number3
DOIs
Publication statusPublished - 1988 Feb 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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