Soft X-ray photoelectron spectroscopy study of activation and deactivation of impurities in shallow junctions

Kazuo Tsutsui, Masaoki Tanaka, Norifumi Hoshino, Hiroshi Nohira, Kuniyuki Kakushima, Parhat Ahmet, Yuichiro Sasaki, Bunji Mizuno, Takayuki Muro, Toyohiko Kinoshita, Takeo Hattori, Hiroshi Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Soft X-ray photoelectron spectroscopy study of activation and deactivation of impurities in shallow junctions'. Together they form a unique fingerprint.

Chemistry

Physics

Material Science