Soft x-ray multilayer phase shifter

M. Yamamoto, M. Yanagihara, H. Nomura, K. Mayama, H. Kimura

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)


Phase shift versus incident angle characteristics of soft x-ray multilayer mirrors have been studied for the first time by rotating analyzer ellipsometry at 97 eV photon energy. Synchrotron radiation was used as a linear polarization source and a multilayer polarizer of 97% polarizance was used as the analyzer. By the reflection at two multilayers mounted in the double crystal configuration, circular polarization was produced. This confirmed a total phase shift of 90°and proved the usefulness of the multilayer as a phase shifter for polarization evaluation.

Original languageEnglish
Pages (from-to)1510-1512
Number of pages3
JournalReview of Scientific Instruments
Issue number1
Publication statusPublished - 1992

ASJC Scopus subject areas

  • Instrumentation


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