Abstract
Soft X-ray emission spectroscopy based on electron microscopy was applied to investigate bonding electron states of amorphous carbon nitride (a-CNx) films with different nitrogen contents of x. Carbon K-emission spectrum showed characteristic intensity distribution of not only sp2 bonding but also sp3 bonding. The a-CNx film with lager x, which has a larger macroscopic electric resistivity, shows a larger content of the carbon sp3: C-C bonding signal. Furthermore, the dependence of spectral intensity distribution on x suggests the presence of sp2: C-N and sp3: C-N bonding. Those results show that the relation between macroscopic electrical resistivity of a-CNx film and its nitrogen content is because of the decrease of sp2: C-C bonding and the formation of sp2: C-N and sp3: C-C and C-N bonding conformation induced by an introduction of nitrogen atoms. Spatial variation of a signal ratio of sp3/sp2 was visualized and was confirmed as a relation between sp3 boding amount and nitrogen content x.
Original language | English |
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Pages (from-to) | 244-249 |
Number of pages | 6 |
Journal | Microscopy |
Volume | 67 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2018 |
Keywords
- Amorphous carbon-nitride
- C K-emission
- Chemical shift
- Soft X-ray emission spectroscopy
- Sp and sp bonding
ASJC Scopus subject areas
- Structural Biology
- Instrumentation
- Radiology Nuclear Medicine and imaging