Soft X-ray dark-field imaging microscope with Wolter-type grazing-incidence mirrors

Hidekazu Takano, Kazuhiro Yokota, Sadao Aoki

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

A soft X-ray dark-field imaging microscope with Wolter-type mirrors was constructed on a laboratory scale. An annular aperture stop was used to cut off the direct beam, which satisfied the dark-field condition. The image is formed only with scattered X-rays from the object. It provides not only absorption but also phase shift information with high contrast. In the dark field, fine particles and defects of the sample that had not been seen in the bright-field image, could be observed. The image formation was analyzed by computer simulation. The dark-field images of organic specimens were also observed and compared with the bright-field images.

Original languageEnglish
Pages (from-to)L1485-L1487
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume38
Issue number12 A
DOIs
Publication statusPublished - 1999
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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