TY - GEN
T1 - Soft-switching technique applicable to capacitive load for resonant inverter of plasma generator
AU - Itakura, Koji
AU - Kakemizu, Hiroaki
AU - Nakaido, Hiroki
AU - Umetani, Kazuhiro
AU - Hiraki, Eiji
AU - Ikenari, Tatsuya
AU - Kawano, Shingo
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/12/15
Y1 - 2017/12/15
N2 - Recently, resonant inverters have been employed to generate high voltage high frequency AC power for plasma generator of the semiconductor processing equipment. This inverter is beneficial in low switching loss owing to its natural soft-switching capability under inductive load impedance. Generally, the resonant inverter for plasma generator is designed to have inductive load using an impedance matching circuit that interfaces the inverter and the plasma reactor. However, the load impedance often fluctuates according to the state of the plasma, momentarily causing the capacitive load impedance. In this case, the inverter is generally controlled to restrict the output power for circuit protection from excessive switching loss, although this will result in unstable plasma, deteriorating the quality of the semiconductor processing. This paper addressed this difficulty by applying a soft-switching technique to the resonant inverter. This soft-switching technique can be utilized regardless to the capacitive or inductive load. Experiment was carried out to evaluate the effectiveness of the proposed technique. As a result, the effective reduction of the switching loss was successfully verified even under the capacitive load impedance.
AB - Recently, resonant inverters have been employed to generate high voltage high frequency AC power for plasma generator of the semiconductor processing equipment. This inverter is beneficial in low switching loss owing to its natural soft-switching capability under inductive load impedance. Generally, the resonant inverter for plasma generator is designed to have inductive load using an impedance matching circuit that interfaces the inverter and the plasma reactor. However, the load impedance often fluctuates according to the state of the plasma, momentarily causing the capacitive load impedance. In this case, the inverter is generally controlled to restrict the output power for circuit protection from excessive switching loss, although this will result in unstable plasma, deteriorating the quality of the semiconductor processing. This paper addressed this difficulty by applying a soft-switching technique to the resonant inverter. This soft-switching technique can be utilized regardless to the capacitive or inductive load. Experiment was carried out to evaluate the effectiveness of the proposed technique. As a result, the effective reduction of the switching loss was successfully verified even under the capacitive load impedance.
KW - capacitive load
KW - plasma generator
KW - resonant inverter
KW - soft-switching
UR - http://www.scopus.com/inward/record.url?scp=85046746225&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85046746225&partnerID=8YFLogxK
U2 - 10.1109/IECON.2017.8216264
DO - 10.1109/IECON.2017.8216264
M3 - Conference contribution
AN - SCOPUS:85046746225
T3 - Proceedings IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society
SP - 1556
EP - 1562
BT - Proceedings IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 43rd Annual Conference of the IEEE Industrial Electronics Society, IECON 2017
Y2 - 29 October 2017 through 1 November 2017
ER -