Soft-switching control circuit based on traveling and reflected waves for high-frequency resonant inverter applicable to capacitive load impedance

Aoi Oyane, Koji Itakura, Kazuhiro Umetani, Eiji Hiraki, Tatsuya Ikenari, Shingo Kawano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

esonant inverters are widely utilized to generate high-frequency high voltage A C power for the power supply to the plasma generator. These inverters commonly require the load impedance to be inductive for achieving soft-switching operation. However, the impedance often fluctuates to be momentarily capacitive due to the unstable state of the plasma, thus causing enormous switching loss and possibly destroying the inverters. This paper addresses this difficulty by using a recently-proposed resonant inverter that can achieve soft-switching operation under the capacitive load impedance. For this purpose, this paper proposes a novel soft-switching controller for applying this inverter for plasma generator application. The proposed controller observes the load impedance and controls the resonant inverter according to the impedance value. Because of the high-frequency A C power supply to the plasma generator, the voltage and current measurement are difficult for estimation of the load impedance. Therefore, the proposed controller estimates the load impedance based on traveling and reflected wave measurement. The experiment revealed successful control of the inverter according to the load impedance, suggesting high feasibility for applying the inverter to the plasma generator.

Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages3051-3056
Number of pages6
ISBN (Electronic)9781509066841
DOIs
Publication statusPublished - 2018 Dec 26
Externally publishedYes
Event44th Annual Conference of the IEEE Industrial Electronics Society, IECON 2018 - Washington, United States
Duration: 2018 Oct 202018 Oct 23

Publication series

NameProceedings: IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society

Conference

Conference44th Annual Conference of the IEEE Industrial Electronics Society, IECON 2018
CountryUnited States
CityWashington
Period18/10/2018/10/23

Keywords

  • Plasma generator
  • Rectional coupler
  • Resonant inverter
  • Soft-switching

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Control and Optimization

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  • Cite this

    Oyane, A., Itakura, K., Umetani, K., Hiraki, E., Ikenari, T., & Kawano, S. (2018). Soft-switching control circuit based on traveling and reflected waves for high-frequency resonant inverter applicable to capacitive load impedance. In Proceedings: IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society (pp. 3051-3056). [8592832] (Proceedings: IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IECON.2018.8592832