Abstract
In Fe-M-(B and/or O)(M= group IV A, VA elements) alloy films, nanocrystalline bcc phase are formed by annealing the amorphous single phase for Fe-M-B films, whereas the bcc nanocrystals are already formed in an as-deposited state for Fe-M-O or Fe-M-B-O) films. Among Fe-M-B films with various M elements, Fe-(Zr, Hf, Nb, Ta)-B alloy films exhibit high saturation magnetization (Is) above 1.4 T and high relative permeability (| μ |) above 1000 at 1MHz. The highest | μ | of 3460 at 1MHz is obtained for Fe78.5Nb8.3B13.2 alloy film. On the other hand, Fe-(Hf, Zr)-O alloy films exhibit the flat frequency characteristics of μ' of approx. 1000 up to 100MHz owing to their considerably higher electrical resistivity (P ) than that of Fe-M-B alloy films. Both the films consist of fine-grained bcc phase with diameter below 20 nm and an amorphous phase containing larger amount of M elements than that in the bcc phase. In Fe-Hf-B-O alloy films, the P values as high as the Fe-Hf-O alloy films are obtained in higher Fe content than the Fe-Hf-O films. As a result, Fe68.9Hf10.2B1.0O19.9 film simultaneously exhibits the higher Is of 1.4T, higher μ' of 1310 at 100MHz, and lower saturation magnetostriction (λs) of 2.2 X 10-6 than those of Fe54.9Hf11.0O34.1 alloy film.
| Original language | English |
|---|---|
| Pages (from-to) | 115-119 |
| Number of pages | 5 |
| Journal | Science Reports of the Rerearch Institutes Tohoku University Series A-Physics |
| Volume | 42 |
| Issue number | 1 |
| Publication status | Published - 1996 Mar 1 |
| Externally published | Yes |
Keywords
- Amorphous phase
- High electrical resistivity
- High permeability
- Nanocrystalline bcc phase
- Soft magnetic films
ASJC Scopus subject areas
- Condensed Matter Physics
- Metals and Alloys