Soft magnetic thin-film applications in the RF range are systematically described based on the complex permeability profile of the films. This work demonstrates the metallic thin-film permeability measurements up to 6 GHz under the existence of traveling electric field, two types of ferromagnetic RF integrated inductor with the best properties of L = 7.9 nH and Q = 12.7 at 2 GHz for a 200 × 400 μm size four-turn rectangular spiral, and a high frequency carrier type thin-film magnetic field sensor (or so-called GMI sensor) with the AC field sensitivity of 4.8 × 10-6 Am m -1/√Hz(6 × 10-12 T/√Hz).
- High frequency carrier type thin-film magnetic field sensor
- Integrated inductor
- Thin films-ferromagnetic
- Ultra high frequency (UHF)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics