TY - JOUR
T1 - Soft magnetic applications in the RF range
AU - Yamaguchi, M.
AU - Miyazawa, Y.
AU - Kaminishi, K.
AU - Kikuchi, H.
AU - Yabukami, S.
AU - Arai, K. I.
AU - Suzuki, T.
N1 - Funding Information:
This work was supported in part by the Grant-In-Aid for Scientific Research, No. 12305025 and No. 13025202, Telecommucations Advancement Organization of Japan (Development of high performance electromagnetic wave absorber by nano structure-controlled thin film material) and Ministry of Education, Culture, Sports, Science and Technology. (Development of micromagnetic technology using room-temperature fabricated highly insulative ferrite films.).
PY - 2004/1
Y1 - 2004/1
N2 - Soft magnetic thin-film applications in the RF range are systematically described based on the complex permeability profile of the films. This work demonstrates the metallic thin-film permeability measurements up to 6 GHz under the existence of traveling electric field, two types of ferromagnetic RF integrated inductor with the best properties of L = 7.9 nH and Q = 12.7 at 2 GHz for a 200 × 400 μm size four-turn rectangular spiral, and a high frequency carrier type thin-film magnetic field sensor (or so-called GMI sensor) with the AC field sensitivity of 4.8 × 10-6 Am m -1/√Hz(6 × 10-12 T/√Hz).
AB - Soft magnetic thin-film applications in the RF range are systematically described based on the complex permeability profile of the films. This work demonstrates the metallic thin-film permeability measurements up to 6 GHz under the existence of traveling electric field, two types of ferromagnetic RF integrated inductor with the best properties of L = 7.9 nH and Q = 12.7 at 2 GHz for a 200 × 400 μm size four-turn rectangular spiral, and a high frequency carrier type thin-film magnetic field sensor (or so-called GMI sensor) with the AC field sensitivity of 4.8 × 10-6 Am m -1/√Hz(6 × 10-12 T/√Hz).
KW - High frequency carrier type thin-film magnetic field sensor
KW - Integrated inductor
KW - Permeability-complex
KW - Resonance-ferromagnetic
KW - Thin films-ferromagnetic
KW - Ultra high frequency (UHF)
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U2 - 10.1016/S0304-8853(03)00495-5
DO - 10.1016/S0304-8853(03)00495-5
M3 - Article
AN - SCOPUS:0242272422
VL - 268
SP - 170
EP - 177
JO - Journal of Magnetism and Magnetic Materials
JF - Journal of Magnetism and Magnetic Materials
SN - 0304-8853
IS - 1-2
ER -