Soft magnetic applications in the RF range

M. Yamaguchi; Y. Miyazawa; K. Kaminishi; H. Kikuchi; S. Yabukami; K. I. Arai; T. Suzuki

doi:10.1016/S0304-8853(03)00495-5

Soft magnetic applications in the RF range

M. Yamaguchi, Y. Miyazawa, K. Kaminishi, H. Kikuchi, S. Yabukami, K. I. Arai, T. Suzuki

Research output: Contribution to journal › Article › peer-review

54 Citations (Scopus)

Abstract

Soft magnetic thin-film applications in the RF range are systematically described based on the complex permeability profile of the films. This work demonstrates the metallic thin-film permeability measurements up to 6 GHz under the existence of traveling electric field, two types of ferromagnetic RF integrated inductor with the best properties of L = 7.9 nH and Q = 12.7 at 2 GHz for a 200 × 400 μm size four-turn rectangular spiral, and a high frequency carrier type thin-film magnetic field sensor (or so-called GMI sensor) with the AC field sensitivity of 4.8 × 10^-6 Am m ^-1/√Hz(6 × 10^-12 T/√Hz).

Original language	English
Pages (from-to)	170-177
Number of pages	8
Journal	Journal of Magnetism and Magnetic Materials
Volume	268
Issue number	1-2
DOIs	https://doi.org/10.1016/S0304-8853(03)00495-5
Publication status	Published - 2004 Jan

Keywords

High frequency carrier type thin-film magnetic field sensor
Integrated inductor
Permeability-complex
Resonance-ferromagnetic
Thin films-ferromagnetic
Ultra high frequency (UHF)

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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title = "Soft magnetic applications in the RF range",

abstract = "Soft magnetic thin-film applications in the RF range are systematically described based on the complex permeability profile of the films. This work demonstrates the metallic thin-film permeability measurements up to 6 GHz under the existence of traveling electric field, two types of ferromagnetic RF integrated inductor with the best properties of L = 7.9 nH and Q = 12.7 at 2 GHz for a 200 × 400 μm size four-turn rectangular spiral, and a high frequency carrier type thin-film magnetic field sensor (or so-called GMI sensor) with the AC field sensitivity of 4.8 × 10-6 Am m -1/√Hz(6 × 10-12 T/√Hz).",

keywords = "High frequency carrier type thin-film magnetic field sensor, Integrated inductor, Permeability-complex, Resonance-ferromagnetic, Thin films-ferromagnetic, Ultra high frequency (UHF)",

author = "M. Yamaguchi and Y. Miyazawa and K. Kaminishi and H. Kikuchi and S. Yabukami and Arai, {K. I.} and T. Suzuki",

note = "Funding Information: This work was supported in part by the Grant-In-Aid for Scientific Research, No. 12305025 and No. 13025202, Telecommucations Advancement Organization of Japan (Development of high performance electromagnetic wave absorber by nano structure-controlled thin film material) and Ministry of Education, Culture, Sports, Science and Technology. (Development of micromagnetic technology using room-temperature fabricated highly insulative ferrite films.). ",

year = "2004",

month = jan,

doi = "10.1016/S0304-8853(03)00495-5",

language = "English",

volume = "268",

pages = "170--177",

journal = "Journal of Magnetism and Magnetic Materials",

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AU - Yamaguchi, M.

AU - Miyazawa, Y.

AU - Kaminishi, K.

AU - Kikuchi, H.

AU - Yabukami, S.

AU - Arai, K. I.

AU - Suzuki, T.

N1 - Funding Information: This work was supported in part by the Grant-In-Aid for Scientific Research, No. 12305025 and No. 13025202, Telecommucations Advancement Organization of Japan (Development of high performance electromagnetic wave absorber by nano structure-controlled thin film material) and Ministry of Education, Culture, Sports, Science and Technology. (Development of micromagnetic technology using room-temperature fabricated highly insulative ferrite films.).

PY - 2004/1

Y1 - 2004/1

N2 - Soft magnetic thin-film applications in the RF range are systematically described based on the complex permeability profile of the films. This work demonstrates the metallic thin-film permeability measurements up to 6 GHz under the existence of traveling electric field, two types of ferromagnetic RF integrated inductor with the best properties of L = 7.9 nH and Q = 12.7 at 2 GHz for a 200 × 400 μm size four-turn rectangular spiral, and a high frequency carrier type thin-film magnetic field sensor (or so-called GMI sensor) with the AC field sensitivity of 4.8 × 10-6 Am m -1/√Hz(6 × 10-12 T/√Hz).

AB - Soft magnetic thin-film applications in the RF range are systematically described based on the complex permeability profile of the films. This work demonstrates the metallic thin-film permeability measurements up to 6 GHz under the existence of traveling electric field, two types of ferromagnetic RF integrated inductor with the best properties of L = 7.9 nH and Q = 12.7 at 2 GHz for a 200 × 400 μm size four-turn rectangular spiral, and a high frequency carrier type thin-film magnetic field sensor (or so-called GMI sensor) with the AC field sensitivity of 4.8 × 10-6 Am m -1/√Hz(6 × 10-12 T/√Hz).

KW - High frequency carrier type thin-film magnetic field sensor

KW - Integrated inductor

KW - Permeability-complex

KW - Resonance-ferromagnetic

KW - Thin films-ferromagnetic

KW - Ultra high frequency (UHF)

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