Soft magnetic applications in the RF range

M. Yamaguchi, Y. Miyazawa, K. Kaminishi, H. Kikuchi, S. Yabukami, K. I. Arai, T. Suzuki

Research output: Contribution to journalArticlepeer-review

54 Citations (Scopus)

Abstract

Soft magnetic thin-film applications in the RF range are systematically described based on the complex permeability profile of the films. This work demonstrates the metallic thin-film permeability measurements up to 6 GHz under the existence of traveling electric field, two types of ferromagnetic RF integrated inductor with the best properties of L = 7.9 nH and Q = 12.7 at 2 GHz for a 200 × 400 μm size four-turn rectangular spiral, and a high frequency carrier type thin-film magnetic field sensor (or so-called GMI sensor) with the AC field sensitivity of 4.8 × 10-6 Am m -1/√Hz(6 × 10-12 T/√Hz).

Original languageEnglish
Pages (from-to)170-177
Number of pages8
JournalJournal of Magnetism and Magnetic Materials
Volume268
Issue number1-2
DOIs
Publication statusPublished - 2004 Jan

Keywords

  • High frequency carrier type thin-film magnetic field sensor
  • Integrated inductor
  • Permeability-complex
  • Resonance-ferromagnetic
  • Thin films-ferromagnetic
  • Ultra high frequency (UHF)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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