Smoothing sidewalls of a MEMS-based silicon X-ray optics

Teppei Moriyama, Yuichiro Ezoe, Tomohiro Ogawa, Takaya Ohashi, Ikuyuki Mitsuishi, Makoto Mita, Kazuhisa Mitsuda, Yoshiaki Kanamori, Akio Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Chemical Compounds

Engineering & Materials Science