Smart multiphysics sensors

Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingChapter


Sensors fabricated based on MEMS technology are described. Capacitive pressure sensors were fabricated by wafer-level packaging. Electrostatically levitated rotational gyroscopes have been developed for high-precision inertia measurement systems. Tactile sensor networks driven by event are under development for safe nursing robots. Acoustic sensors for wireless sensing, optical scanners for 3D imaging, sensors at the end of a catheter in a blood vessel and microprobes with high spatial resolution and high sensitivity have been developed as well.

Original languageEnglish
Title of host publicationIntelligent Integrated Systems
Subtitle of host publicationDevices, Technologies, and Architectures
PublisherPan Stanford Publishing Pte. Ltd.
Number of pages24
ISBN (Electronic)9789814411431
ISBN (Print)9789814411424
Publication statusPublished - 2014 Apr 30

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)


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