Small volume freestanding micro fluidic system for calorimetry biosensor

Zhuqing Wang, Mitsuteru Kimura, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this research, we proposed a new method to fabricate small volume and freestanding micro fluidic system for thermal biosensor with MEMS technology. The freestanding micro fluidic system is fabricated by SU-8 polymer which can be used in suspended thermal sensor device to allow heat loss. The fabricated SU-8 polymer-based microfluidic reactive chamber allows high sensitive measurement of small volumes of liquid samples for thermal biosensor. The fabricated thermal biosensor shows a sensitivity of approximately 0.27 V/W. The results demonstrate that the new micro fluidic system fabrication method is capable of enzyme-catalyzed reaction detection for healthcare application.

Original languageEnglish
Title of host publication22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PublisherChemical and Biological Microsystems Society
Pages1221-1224
Number of pages4
ISBN (Electronic)9781510897571
Publication statusPublished - 2018
Event22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 - Kaohsiung, Taiwan, Province of China
Duration: 2018 Nov 112018 Nov 15

Publication series

Name22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Volume2

Conference

Conference22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Country/TerritoryTaiwan, Province of China
CityKaohsiung
Period18/11/1118/11/15

Keywords

  • Calorimetry
  • Freestanding micro fluidic system
  • SU-8 polymer
  • Thermal biosensor

ASJC Scopus subject areas

  • Chemistry(all)
  • Bioengineering
  • Chemical Engineering (miscellaneous)
  • Control and Systems Engineering

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