TY - GEN
T1 - Small volume freestanding micro fluidic system for calorimetry biosensor
AU - Wang, Zhuqing
AU - Kimura, Mitsuteru
AU - Ono, Takahito
N1 - Funding Information:
This research was supported by the Center of Innovation (COI) program of Japan Science and Technology Agency (JST).
Publisher Copyright:
Copyright © (2018) by Chemical and Biological Microsystems Society. All rights reserved.
PY - 2018
Y1 - 2018
N2 - In this research, we proposed a new method to fabricate small volume and freestanding micro fluidic system for thermal biosensor with MEMS technology. The freestanding micro fluidic system is fabricated by SU-8 polymer which can be used in suspended thermal sensor device to allow heat loss. The fabricated SU-8 polymer-based microfluidic reactive chamber allows high sensitive measurement of small volumes of liquid samples for thermal biosensor. The fabricated thermal biosensor shows a sensitivity of approximately 0.27 V/W. The results demonstrate that the new micro fluidic system fabrication method is capable of enzyme-catalyzed reaction detection for healthcare application.
AB - In this research, we proposed a new method to fabricate small volume and freestanding micro fluidic system for thermal biosensor with MEMS technology. The freestanding micro fluidic system is fabricated by SU-8 polymer which can be used in suspended thermal sensor device to allow heat loss. The fabricated SU-8 polymer-based microfluidic reactive chamber allows high sensitive measurement of small volumes of liquid samples for thermal biosensor. The fabricated thermal biosensor shows a sensitivity of approximately 0.27 V/W. The results demonstrate that the new micro fluidic system fabrication method is capable of enzyme-catalyzed reaction detection for healthcare application.
KW - Calorimetry
KW - Freestanding micro fluidic system
KW - SU-8 polymer
KW - Thermal biosensor
UR - http://www.scopus.com/inward/record.url?scp=85079845117&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85079845117&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85079845117
T3 - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
SP - 1221
EP - 1224
BT - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PB - Chemical and Biological Microsystems Society
T2 - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Y2 - 11 November 2018 through 15 November 2018
ER -