SMA microactuators for microvalve applications

M. Kohl; Y. Liu; B. Krevet; S. Dürr; M. Ohtsuka

doi:10.1051/jp4:2004115039

SMA microactuators for microvalve applications

M. Kohl, Y. Liu, B. Krevet, S. Dürr, M. Ohtsuka

Center for Mineral Processing and Metallurgy (CMPM)

Research output: Contribution to journal › Conference article › peer-review

29 Citations (Scopus)

Abstract

This paper presents a study of the mechanical and thermal properties of SMA microvalves, which are driven by a microactuator of a NiTi foil or a Ni ₂MnGa thin film. By coupled finite element simulations, von Mises stress profiles and resulting actuation forces are determined, which are compared with experimental force-displacement characteristics. The relatively high phase transformation temperatures of the used Ni₂MnGa specimens M_f / A_f of 92 / 125°C, give rise to cooling times of about 25 ms compared to 90 ms for NiTi. Thus, Ni₂MnGa microvalves show a superior switching performance. However, due to brittleness and buckling instability, Ni₂MnGa microvalves only allow a maximum controllable pressure difference of 70 kPa, which is more than a factor of 7 smaller compared to NiTi microvalves.

Original language	English
Pages (from-to)	333-342
Number of pages	10
Journal	Journal De Physique. IV : JP
Volume	115
DOIs	https://doi.org/10.1051/jp4:2004115039
Publication status	Published - 2004 Dec 1
Event	EUROMECH-MECAMAT'2003: 7th European Mechanics of Materials Conference on Adaptive Systems and Materials: Constitutive Materials and Hybrid Structures - Frejus, France Duration: 2003 May 18 → 2003 May 23

ASJC Scopus subject areas

Physics and Astronomy(all)

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title = "SMA microactuators for microvalve applications",

abstract = "This paper presents a study of the mechanical and thermal properties of SMA microvalves, which are driven by a microactuator of a NiTi foil or a Ni 2MnGa thin film. By coupled finite element simulations, von Mises stress profiles and resulting actuation forces are determined, which are compared with experimental force-displacement characteristics. The relatively high phase transformation temperatures of the used Ni2MnGa specimens Mf / Af of 92 / 125°C, give rise to cooling times of about 25 ms compared to 90 ms for NiTi. Thus, Ni2MnGa microvalves show a superior switching performance. However, due to brittleness and buckling instability, Ni2MnGa microvalves only allow a maximum controllable pressure difference of 70 kPa, which is more than a factor of 7 smaller compared to NiTi microvalves.",

author = "M. Kohl and Y. Liu and B. Krevet and S. D{\"u}rr and M. Ohtsuka",

year = "2004",

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TY - JOUR

T1 - SMA microactuators for microvalve applications

AU - Kohl, M.

AU - Liu, Y.

AU - Krevet, B.

AU - Dürr, S.

AU - Ohtsuka, M.

PY - 2004/12/1

Y1 - 2004/12/1

N2 - This paper presents a study of the mechanical and thermal properties of SMA microvalves, which are driven by a microactuator of a NiTi foil or a Ni 2MnGa thin film. By coupled finite element simulations, von Mises stress profiles and resulting actuation forces are determined, which are compared with experimental force-displacement characteristics. The relatively high phase transformation temperatures of the used Ni2MnGa specimens Mf / Af of 92 / 125°C, give rise to cooling times of about 25 ms compared to 90 ms for NiTi. Thus, Ni2MnGa microvalves show a superior switching performance. However, due to brittleness and buckling instability, Ni2MnGa microvalves only allow a maximum controllable pressure difference of 70 kPa, which is more than a factor of 7 smaller compared to NiTi microvalves.

AB - This paper presents a study of the mechanical and thermal properties of SMA microvalves, which are driven by a microactuator of a NiTi foil or a Ni 2MnGa thin film. By coupled finite element simulations, von Mises stress profiles and resulting actuation forces are determined, which are compared with experimental force-displacement characteristics. The relatively high phase transformation temperatures of the used Ni2MnGa specimens Mf / Af of 92 / 125°C, give rise to cooling times of about 25 ms compared to 90 ms for NiTi. Thus, Ni2MnGa microvalves show a superior switching performance. However, due to brittleness and buckling instability, Ni2MnGa microvalves only allow a maximum controllable pressure difference of 70 kPa, which is more than a factor of 7 smaller compared to NiTi microvalves.

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JO - European Physical Journal: Special Topics

JF - European Physical Journal: Special Topics

SN - 1951-6355

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Y2 - 18 May 2003 through 23 May 2003

ER -

SMA microactuators for microvalve applications

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