SMA microactuators for microvalve applications

M. Kohl, Y. Liu, B. Krevet, S. Dürr, M. Ohtsuka

Research output: Contribution to journalConference articlepeer-review

29 Citations (Scopus)


This paper presents a study of the mechanical and thermal properties of SMA microvalves, which are driven by a microactuator of a NiTi foil or a Ni 2MnGa thin film. By coupled finite element simulations, von Mises stress profiles and resulting actuation forces are determined, which are compared with experimental force-displacement characteristics. The relatively high phase transformation temperatures of the used Ni2MnGa specimens Mf / Af of 92 / 125°C, give rise to cooling times of about 25 ms compared to 90 ms for NiTi. Thus, Ni2MnGa microvalves show a superior switching performance. However, due to brittleness and buckling instability, Ni2MnGa microvalves only allow a maximum controllable pressure difference of 70 kPa, which is more than a factor of 7 smaller compared to NiTi microvalves.

Original languageEnglish
Pages (from-to)333-342
Number of pages10
JournalJournal De Physique. IV : JP
Publication statusPublished - 2004 Dec 1
EventEUROMECH-MECAMAT'2003: 7th European Mechanics of Materials Conference on Adaptive Systems and Materials: Constitutive Materials and Hybrid Structures - Frejus, France
Duration: 2003 May 182003 May 23

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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