Sm-doped Pb(Mg, Nb)O-PbTiO Sputter-Epitaxy on Si towards Giant-Piezoelectric Thin Film for Mems

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Pb(Zr, Ti)O (PZT) has been the most widely utilized in piezoelectric Micro Electro Mechanical Systems (MEMS) actuator. However, the improvement of its piezoelectricity has been saturated recently. Thus, we have developed Sm-doped Pb(Mg, Nb)O3-PbTiO (Sm-PMN-PT) epitaxial thin film as a next-generation piezoelectric thin film beyond PZT. In this study, a (001)/(100)-oriented Sm-PMN-PT with the pure perovskite phase was successfully sputter-deposited on a Si substrate using an epitaxial PZT buffer layer. The transverse piezoelectric coefficient, |e|, of a 1.5-gm-thick Sm-PMN-PT/PZT stack film measured over 20 C/m, which is equivalent to or better than those of the best class PZT thin films. From this result, the influence of the PZT buffer layer was deembedded, and |e| of the sole Sm-PMN-PT thin film was estimated at higher than 26 C/m. This result suggests a potential of epitaxial Sm-PMN-PT for high-performance piezo-MEMS.

Original languageEnglish
Title of host publication34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages654-657
Number of pages4
ISBN (Electronic)9781665419123
DOIs
Publication statusPublished - 2021 Jan 25
Event34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
Duration: 2021 Jan 252021 Jan 29

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2021-January
ISSN (Print)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
CountryUnited States
CityVirtual, Gainesville
Period21/1/2521/1/29

Keywords

  • Microelectro-mechanical systems (MEMSs)
  • Nb)-PbTiO film
  • Sm-Pb(Mg
  • sputter deposition
  • transverse piezoelectric coefficient

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Sm-doped Pb(Mg, Nb)O-PbTiO Sputter-Epitaxy on Si towards Giant-Piezoelectric Thin Film for Mems'. Together they form a unique fingerprint.

Cite this