Slit design consideration on the ferromagnetic RF integrated inductor

Masahiro Yamaguchi, Keiju Yamada, Ki Hyeon Kim

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)


Five types of RF integrated spiral inductors were microfabricated and applied for the discussion of local anisotropy field distribution in the film and the local current distribution in the coil cross section, which strongly influences the frequency profile of the complex permeability, ferromagnetic resonance (FMR) frequency and inductance-capacitance (LC) resonance frequency. The shifted type inductor exhibited as high quality factor as 20.7 at 1.9 GHz because the local FMR frequency is the highest and the current distribution is most uniform among the test inductors.

Original languageEnglish
Pages (from-to)3341-3343
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number10
Publication statusPublished - 2006 Oct


  • Complex permeability
  • Electromagnetic field simulation
  • Ferromagnetic resonance (FMR) frequency
  • Quality factor
  • RF integrated inductor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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