Abstract
Five types of RF integrated spiral inductors were microfabricated and applied for the discussion of local anisotropy field distribution in the film and the local current distribution in the coil cross section, which strongly influences the frequency profile of the complex permeability, ferromagnetic resonance (FMR) frequency and inductance-capacitance (LC) resonance frequency. The shifted type inductor exhibited as high quality factor as 20.7 at 1.9 GHz because the local FMR frequency is the highest and the current distribution is most uniform among the test inductors.
Original language | English |
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Pages (from-to) | 3341-3343 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 42 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2006 Oct |
Keywords
- Complex permeability
- Electromagnetic field simulation
- Ferromagnetic resonance (FMR) frequency
- Quality factor
- RF integrated inductor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering