Skin effect suppression in multilayer thin-film spiral inductor taking advantage of negative permeability of magnetic film beyond FMR frequency

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

This paper describes the study on skin effect suppression in multilayer thin film coplanar transmission lines and spiral inductors taking advantage of negative permeability of ferromagnetic film beyond the ferromagnetic resonance (FMR) frequency. The Al/NiFe and Cu/CoZrNb multilayered thin film coplanar transmission lines are studied. The measured resistance of both coplanar transmission lines becomes small when the real part permeability is negative, as the number of layers is more than 15, suggesting that each metal layer should be thinner than the skin depth of original metal layer. As for the spiral inductor consisting of Cu/CoZrNb multilayered thin film, the quality factor exhibited 14.6 at 5.2 GHz at largest.

Original languageEnglish
Title of host publicationEuropean Microwave Week 2010, EuMW2010
Subtitle of host publicationConnecting the World, Conference Proceedings - European Microwave Conference, EuMC 2010
Pages1182-1185
Number of pages4
Publication statusPublished - 2010
Event13th European Microwave Week 2010, EuMW2010: Connecting the World - 40th European Microwave Conference, EuMC 2010 - Paris, France
Duration: 2010 Sep 282010 Sep 30

Publication series

NameEuropean Microwave Week 2010, EuMW2010: Connecting the World, Conference Proceedings - European Microwave Conference, EuMC 2010

Other

Other13th European Microwave Week 2010, EuMW2010: Connecting the World - 40th European Microwave Conference, EuMC 2010
Country/TerritoryFrance
CityParis
Period10/9/2810/9/30

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Radiation

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